Brewer Science Commercializes Megasonic Developer for MEMS, Compound Semiconductor Applications

Brewer Science announced the first commercial placement of a Cee 300MXD megasonic developer, which was commissioned by MicroChem Corp.

The Brewer Science Cee 300MXD megasonic developer applies uniform acoustic energy to spinning substrates to gently dissolve and remove films and residues without damaging fragile device structures. This precision handling results in stable dimensional control of vertical profiles uniformly across the wafer surface, enabling fabrication of high-aspect-ratio structures for the MEMS, display, compound semiconductor, and advanced packaging markets. Applications include radio-frequency (RF) power, MEMS, sensors and acoustic wave devices used for wireless communication.

“The Cee 300MXD developer features state-of-the-art technology that creates a viable pathway for our customers to decrease process cycle times, reduce cost of ownership and accelerate time to market,” said Justin Furse, Brewer Science equipment technology strategist.